Professor Jun-Bo Yoon’s group at KAIST has recently demonstrated bulk production of 200 mm long nanowires. The process begins with a silicon master template, which is used to fabricate many (thousands?) of disposable plastic templates. One then applies the nanowire material to the plastic template by PVD. It would appear that any material which can be deposited by PVD onto the plastic can be used, viz., metals, oxides and nitrides are demonstrated in the paper. Shadowing during PVD leads to the deposition being thinner in the trenches than on the peaks; a clean-up etch removes the trench material and leaves isolated wires atop each peak.
See the abstract (and select images) at ACS NanoLetters. The full paper can be found on Prof. Yoon’s website.