A group at TNO Delft are preparing a proof of principle, parallel, miniaturized AFM. This instrument does not scan an array of tips together over a sample. Rather, it miniaturizes the entire cantilever and drive, then runs a collection of them independently over the sample. The instrument shown in the preprint is capable of inspecting a semiconductor wafer or photomask. It is quite a feat of mechanical engineering.
Reference: H. Sadeghian, et al., “High-Throughput Atomic Force Microscopes Operating in Parallel”, arXiv:1611.06582.